|SmartFOUP and SmartBox Deployment Platforms|
The SmartFOUP and SmartBox deployment platforms are built upon wireless technology expertise. Each deployment platform device contains a fully sealed on-board diagnostics system that provides the “intelligence” while maintaining a strict, contamination-free storage environment. Advanced electronics and diagnostic routines provide hands-free, automated control of all required SensorWafer maintenance functions yielding “on-demand” SensorWafer availability. SmartFOUP deployment platform facilitates deployment of the SensorWafer metrology system in advanced 300mm semiconductor production lines while SmartBox deployment platform provides full maintenance capabilities for SensorWafers and MaskTemp. SmartFOUP deployment platform provides the factory integration and SmartBox deployment platform provides the flexibility and portability demanded by fab production engineers.
SmartFOUP and SmartBox Deployment Platform Capabilities: