APTI (Arrays of Peak Temperature Indicators) buttons are a unique temperature measurement tool from SensArray for measuring and profiling peak temperature using non-reversible temperature indicators. APTI buttons are ideally suited for plasma and other semiconductor and flat panel display processes that present environmental challenges.
APTI buttons allow you to conveniently test glass temperature without taking your system off-line or opening your chamber. Simply attach the APTI buttons to your glass panel, load it, and process the glass as you would during a normal production run.
APTI buttons can also be attached directly to chamber walls or placed at other locations within your process chamber.
APTI (Arrays of Peak Temperature Indicators) buttons are a unique temperature measurement tool from SensArray for measuring and profiling peak temperature using non-reversible temperature indicators. APTI buttons are ideally suited for plasma and other semiconductor and flat panel display processes that present environmental challenges.