Product Description

Klarity Defect is an automated inline defect analysis module and data management system that helps fabs achieve faster yield learning cycles through real-time identification of excursions. Featuring easy recipe creation and seamless integration with patterned or unpatterned wafer inspectors, Klarity Defect provides capabilities such as efficient defect source analysis, for faster identification of yield problems.

• Provides fabs with automated analysis of defect data generated by inspection, review, and classification tools for line monitoring, instant go/no-go decision-making, and improved operating efficiency
• Automates complex engineering methodologies using simple flowcharts, dramatically improving productivity and time to results
• Enables transfer of expert engineering knowledge and defect-analysis routines to fab operators
• Delivers rapid analysis of huge volumes of defect data and reduces data sets to reveal the critical yield-killers
• Features fast, intuitive recipe creation and scheduling
• Links with Klarity SSA to provide complete signature analysis capability

Application

Klarity Defect with Klarity Bitmap, Klarity SSA, and Klarity ACE XP form a fab-wide yield acceleration solution that automatically reduces defect inspection, classification and review data to relevant root-cause and yield-analysis information. Using this information, manufacturers can take corrective action sooner, resulting in faster yield improvements and better time to market.

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• Klarity Defect Product Overview

• An Automated Recipe-Based Defect Analysis System for ASICs