Product Description

Available on KLA-Tencor's defect inspection platforms, inline Defect Organizer (iDO) is an automatic defect classification module that works in real time during inspection. As an integral part of KLA-Tencor's yield monitoring solution, iDO provides consistent and accurate classification of yield-limiting defects, enabling baseline yield improvement and faster resolution of excursions.

• Provides consistent and rapid classification results with defect information available as soon as the wafer completes inspection
• Produces information on the whole wafer's defect population and narrows the population of defects requiring offline review
• Utilizes a decision tree classifier structure that separates classification into a series of simple, logical steps
• Provides flexible classification schemes that can be defined and customized by the user
• Enables fabs to monitor excursions, trend by defect type, and intelligently sample defects of interest
• Offers seamless integration, cross-platform capability, and a common automatic defect classification methodology across KLA-Tencor patterned wafer inspection systems

Applications

Review Sample Shaping: By removing nuisance defects (such as metal grain or prior-level defects) and separating defects into coarse bins, iDO sends a smaller, more relevant defect sample for review. These review sample shaping capabilities enable more efficient review and faster time to results.

Defect Type Monitoring: iDO separates defects for trending and monitoring by defect type. This improves time to results by quickly flagging type-specific excursions.

Contact Me >

• Application of Automatic Defect Classification in Photolithography