Product Description

The PVI-6™ is designed for optical in-line dual sided inspection of photovoltaic (PV) wafers and cells. The newest addition to KLA-Tencor’s ICOS division‘s PV portfolio, the PVI-6 provides customers with the capability to inspect solar wafers and cells at the highest speed and accuracy for all stages of the production process. These new capabilities enable solar manufacturers to achieve substantial yield improvements and more accurate product classification

The PVI-6 consists of a family of inspection modules designed for inspection of solar cells throughout the production process, from bare wafer, to SiN coating, metallization and final classification. Additionally, the PVI-6 software includes improved ease of use and analytical tools to increase the overall yield of the solar cell production process.

The PVI-6 offers solar wafer and cell manufacturers:

• Higher accuracy and repeatability measurements, with up to a 4x measurement accuracy improvement, delivers higher yield and improved end-of-line cell classification
• Easier calibration and set-up, with calibration time decreased by approximately 80 percent, enables faster product ramp during initial installation
• Tool matching and central module management, offers consistent and easily attainable results in large production environments, across multiple production lines

Applications:

PVI-6 consists of a family of inspection modules, designed for:

• Inspection of bare solar wafers
• Inspection of wafers after silicon nitride (SiN) coating and after each metallization step
• End-of-line cell classification

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