Chip Manufacturing

Metrology

Therma-Probe 630 XP
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Product Description

Therma-Probe is the industry standard for implant dose metrology. With its advances in modulated optical reflectance, Therma-Probe provides dose measurements for in-line monitoring, including anneal and USJ profiling. The system contributes to higher yield by monitoring for process excursions.
  • Measurements on product wafers eliminate cost of monitor wafers
  • In-line monitoring helps reduce or prevent scrap
  • In-line implant tool qualification checks enhance implant productivity
  • Superior tool matching performance facilitates fab-to-fab technology transfers

Application

In-line dose monitoring, high dose microuniformity imaging, anneal micro-structure mapping, ultra-shallow junction (USJ) depth

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