Surface Topography Profiling
The HRP-250 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface topography profiling for leading edge 200mm applications. This surface topography metrology tool's ultra-fine 20nm stylus tip option enables down to 45nm-generation surface profiling at cost-effective throughputs for critical transistor and interconnect applications. Featuring diamond styli down to 20nm radius and a lower-noise platform for enhanced measurement sensitivity, the HRP-250 surface topography metrology system offers nanometer-scale stylus technology which matches AFM resolution - without modeling requirements. In addition to the 200mm HRP-250 surface topography metrology system, a 300mm HRP-350 surface topography metrology system is also available for IC semiconductor manufacturing applications.