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Metrology is a critical discipline in the production of high performance, reliable devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing processes, our comprehensive set of metrology, analysis and process window optimization products gives IC manufacturers the ability to maintain tight control of their processes.
Overlay
Optical CD
- AcuShape: Modeling and library-generation package for optical CD systems
- SpectraCD: Optical critical-dimension (CD) and profile metrology systems
Film Thickness / Index
- Aleris Family: Film thickness, refractive index (RI), stress and composition metrology systems for leading-edge applications
- ASET-F5x: Film thickness, refractive index (RI) and stress metrology system for the 90nm and higher design nodes
- SpectraFx: Film thickness, RI and stress metrology systems for product wafers at the 90nm and 65nm nodes
- SURFmonitor: Optional module for Surfscan SP2-family systems providing full-wafer maps that correlate to film properties, for blanket films
Wafer Geometry and Topography
- WaferSight: Wafer thickness, shape and flatness metrology systems
- SURFmonitor: Optional module for Surfscan SP2-family systems indicating sub-Angstrom surface topography variation on blanket films and bare substrates
Ion Implant
Surface Profiling
- HRP-x50: Automated, stylus-based surface profilers for topographic surface measurements
Resistivity
- RS-x00: Sheet resistance mapping systems
Reticle Pattern Placement
- LMS IPRO4: Reticle pattern placement metrology system
Edge
- VisEdge Family: Wafer edge defect inspection, metrology and review systems
Data Management
- K-T Analyzer: Data analysis system for overlay and CD metrology data
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