Chip Manufacturing

Metrology

Metrology
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Metrology is a critical discipline in the production of high performance, reliable devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing processes, our comprehensive set of metrology, analysis and process window optimization products gives IC manufacturers the ability to maintain tight control of their processes.

Overlay

Optical CD

  • AcuShape: Modeling and library-generation package for optical CD systems
  • SpectraCD: Optical critical-dimension (CD) and profile metrology systems

Film Thickness / Index

  • Aleris Family: Film thickness, refractive index (RI), stress and composition metrology systems for leading-edge applications
  • ASET-F5x: Film thickness, refractive index (RI) and stress metrology system for the 90nm and higher design nodes
  • SpectraFx: Film thickness, RI and stress metrology systems for product wafers at the 90nm and 65nm nodes
  • SURFmonitor: Optional module for Surfscan SP2-family systems providing full-wafer maps that correlate to film properties, for blanket films

Wafer Geometry and Topography

  • WaferSight: Wafer thickness, shape and flatness metrology systems
  • SURFmonitor: Optional module for Surfscan SP2-family systems indicating sub-Angstrom surface topography variation on blanket films and bare substrates

Ion Implant

Surface Profiling

  • HRP-x50: Automated, stylus-based surface profilers for topographic surface measurements

Resistivity

  • RS-x00: Sheet resistance mapping systems

Reticle Pattern Placement

  • LMS IPRO4: Reticle pattern placement metrology system

Edge

  • VisEdge Family: Wafer edge defect inspection, metrology and review systems

Data Management

  • K-T Analyzer: Data analysis system for overlay and CD metrology data