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The increasing demand for MEMS (micro-electromechanical systems) technology is coming from diverse industries such as automotive manufacturing, space and consumer electronics. MEMS manufacturing promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. KLA-Tencor offers the tools and techniques, first developed for the integrated circuit industry, for this emerging MEMS market.
Surface Metrology
Stylus Profiling
- P-Series: Benchtop stylus profilers for manufacturing applications
Sealing Inspection
Infrared Inspection
- IRIS: Automated infrared inspection and review station
Defect Review
Review Microscopes
- INM-Series: Universal defect review microscopes
- IRIS: Automated infrared inspection and review station
Wafer Inspection
- ICOS WI-2xx0: Optical inspection and metrology of microelectronic devices on a variety of wafer substrate
- ICOS WI-22xx Series: Automated optical inspection and metrology of microelectronic devices on a variety of wafer substrates, surface inspection, and 2D bump inspection
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