After investing 12+ hours writing the pattern, use MaskTemp to confirm that the post-process is under control prior to sending that critical plate to the post develop track and etch. MaskTemp behaves like a regular plate – in fact, it is built into a plate, has no tethers, and can be deployed on the production equipment just like a test plate. However, it is reusable time after time, so its cost is lower than using test plates, and trivial compared with the savings in WIP lost, time lost to test, and process requalification. Get ready for a new paradigm in mask making – wireless, mobile metrology that takes a real look inside the process zone, is re-usable, and effectively zero footprint. That’s MaskTemp.

Full Coverage
MaskTemp’s sensors cover a 142mm x 142mm area (4mm edge exclusion) which is well beyond the 132mm scan or 125mm critical mask areas.

Multiple-Applications
The design of MaskTemp enables its use in etch, PEB, PAB without needing separate sensors. It has a wide operating range (20°C to 140°C) and is calibrated to +/- 0.1°C.

Cost Effective
By incorporating a field replaceable battery into its design, MaskTemp can be reused until physical wear out, making it a low cost solution for a critical need in the industry.

Wireless
The sensors send their data to an onboard mini-system, which uploads the data wirelessly to the software systems avoiding invasive cables, wires, etc., and eliminating physical contact that would cause contamination.

Particulate Control
The high purity polyimide coating shields the sensor network and mini-system from the process environment. The substrate is 6025 high purity quartz.

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