Wireless BakeTemp SensorWafers offer precise, in-situ temperature monitoring of resist track bake plates. Proprietary sensor technology accurately characterizes the actual production wafer thermal processes. As SensorWafers are built on production grade silicon wafers, standard wafer-handling track robotics easily deploy them without any equipment modifications or production downtime. Customers can now achieve accurate measurement of the critical process zone for thermal treatment of resists.

	SensArray's latest BakeTemp is the 4th generation wireless SensorWafer BakeTemp SensorWafers are the industry’s first wireless process zone control product. The onboard electronics module stores process run data and uploads it via infrared to the communications port in the FOUP, Laptop, or Handheld. It is a self-contained system not requiring tethers to the host.