This is an introductory course for the maintenance of the Prometrix ® UV-1250SE Thin Film Measurement system, designed for persons who maintain the system in a wafer fabrication area. The course provides the student with an understanding of operational and diagnostic software, as well as the skills to perform lamp changes, handler alignments, SE diagnostics, and PMs.

• Audience - Equipment and Maintenance Engineers
• Prerequisite - Students should be familiar with general wafer manufacturing processes and basic operation of the Prometrix ® UV-1250SE system.
• Length- 5 days

Schedule of Classes

There are no classes currently scheduled. Please contact Enrollment Operations to request training.

Generated on 2007-11-19 at 23:03:54-0800.
All dates in ISO-8601 'CCYY-MM-DD' format.

Objectives

Upon completion student will be able to:

• • Major Components
    • Identify the major components of the UV-1250SE and handler
    • Identify each printed circuit board on the UV-1250SE
    • Explain the basic function of each pc board
    • Verify that electronics cables are correctly connected
    • Demonstrate the proper technique for connecting and disconnecting fiber optic cables
    • Power up the UV-1250SE correctly
  • Optics
    • Explain what the UV-1250SE is supposed to do
    • Define:
      • Wavelength
      • Interference
      • Polarization
    • Define DBS
    • Give a simple explanation of how the Dual Beam Spectrometer (DBS) portion of the UV-1250SE works
    • Define Spectroscopic Ellipsometry (SE)
  • Optical Components
    • Explain the purpose of
      • The lamp
      • The parabaloid
      • The two DBS light paths
      • The 40mm aperture
      • The field illumination lens
      • The beam divider
      • The reference path
    • Explain the purpose of
      • The pinhole mirror
      • The pentaprism
      • The diffraction grating
      • The fiber optic cable
      • Both "Rochons"
    • Explain the rectangles visible in the video image
    • Explain the functions of the 1x, 4x and 15x objectives
  • Lamp Replacement
    • Demonstrate the proper procedure for a lamp replacement
    • List ways to reduce lamp noise
    • System Diagnostics
    • Use 1250Diag to operate optical components
    • Use the video display to troubleshoot optics problems
    • Adjust the spectrometer PDA's
  • Stage
    • Identify and describe the purpose of
      • x, y lead screws
      • z focus knob
      • z flag sensors
      • circuit breakers
      • z hardstop
    • Lubricate stage in x, y, and z directions
  • Wafer Handler
    • Identify major components of the H2D Handler
    • Identify each board and its purpose
    • List which cards are interchangeable
    • State the purpose of the z emergency encoder and brake
  • Handler
    • Lubricate Handler including flat aligner
    • Align Handler to itself and tester stage
    • Align tester stage to handler
    • Teach the tester how the wafer is positioned on the stage
  • Operator Interface
    • State the purpose of the Operator Interface
    • Navigate the organizer
    • Identify parts of recipes
    • Setup system calibration recipe
    • Run calibrations

Course Outline

• • PRODUCT INFORMATION
    • Maintenance Manual
    • Summit User's Guide
  • HARDWARE OVERVIEW
    • External Control Panel
      • System Status Indicators
        • System Power
        • Joystick
        • User Controls
        • Display
      • Emergency Off Button (EMO)
      • Joystick
      • Stage Movement Controls
        • Measure
        • Up
        • Down
        • Auto
    • Internal Control Panel
      • Power Control Switches
      • Status Control Switches
      • Lamp Hour Meter
      • Disk Drive
      • Tape Drive
    • Dual Beam Spectrometer (DBS)
      • Illuminator Assembly
        • Lamp House Removable Window
        • Paraboloid Mirror
        • UV Cutoff Filter
        • Color Filter Wheel
        • Field Lens
        • 7mm Achromat Lens
        • Focus Aperture
        • Aperture Mirror
      • Reference Mirror
      • Relay Lens Assembly
      • Spectrometer
      • Neutral Density Filter
      • CCD Camera
    • Spectroscopic Ellipsometer (SE)
      • Illuminator Slider
      • Fiber Mount & Fiber
      • Slit Mount
      • Polarizer Assembly
      • Turret Box
        • Focus Mirror
        • Collection Mirror
        • Fold Mirror
      • Analyzer Assembly
      • Spectrograph
      • Detector Assembly
  • ELECTRONICS
    • Tester
      • Measurement Control Board
      • Optics Interface Board
      • Turret Driver Board
      • Focus Flipper Driver Board
      • Stage Control Board
      • SBC Interconnect
      • Single Board Controller
      • LED Status Board
      • Door Interconnect Board
      • Operator Interface Board
      • System Computer
        • Digi 8 Board
        • PC Interface Board
        • Matrox Marvel Board
        • SCSI Board
        • Cognex
    • Handler
      • Card Cage
        • Servo Controller Boards
        • Parallel I/O Boards
        • CPU Board
      • Main Interface Board
        • Vacuum Sensors
        • Cassette Sensors
      • Interface Boards
  • THEORY
    • Optics
      • Dual Beam Spectrometer (DBS)
      • Spectroscopic Ellipsometer (SE)
  • SOFTWARE OVERVIEW
    • Operating
      • Summit
        • Security
        • Summit System Status Window
        • Organizer
        • Recipe Cards
          • Information
          • Measurement Location
          • Film Stack
          • Preferences
        • System Calibration
        • Running calibrations
    • Diagnostic
      • Lampcal
      • 1250DIAG
        • 8 Sums
        • Asymmetry
        • Focus Offset Curve
        • SE Random Noise
        • Terminal Control Utility
      • MPTERM
      • batch files
      • individual commands
      • H2D
        • Handler positioning
        • Teaching
          • cassettes
          • aligner
      • FTC
        • load position
        • load calibration
  • MAINTENANCE
    • Lamp Change
    • Handler
      • Lubrication
        • z-slides and ballscrew
        • shuttle slides
        • pre-aligner slides
      • Vacuum Sensor Adjustments
      • Cassette Sensor Adjustments
      • Belt Replacement
    • Facilities
      • air regulator adjustment
      • vacuum regulator adjustment
    • Tester Lubrication
      • x & y stage slides and ballscrews
      • z-stage gear