The TP Applications class is designed to give students a comprehensive understanding of how the Therma-Probe works, how to make measurements, and which monitoring strategies are recommended. The first couple of days are spent reviewing the basics of making measurements and interpreting data. The middle section of the course teaches students how to set up jobfiles on the tool. The end of the course is used to introduce students to advanced topics such as tool calibration and implant monitoring strategies.

The course can be taught on either a TP500 series tool or a TP630 series tool, based on the customer preference.

• Audience - The course is targeted for fab engineers.
• Prerequisite - None
• Length - 5 days
  

 Objectives

Upon completion student will be able to:

• Perform Therma-Probe measurements
• Identify the different data that can be viewed/reviewed from the tool
• Describe the Therma-Probe theory and what the tool is measuring
• Create jobfiles
• Perform calibration of the tool
• Explain implant monitoring strategies
• Identify signatures of Implant/tool problems
• Perform troubleshooting and diagnostics