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Certified Used Equipment

SP2:Customer Equipment Training
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Course Description:

The emphasis of this course is for the students to be able to perform the operations for customer equipment tasks. KLA-Tencor takes great care in defining the task list for each customer training class taking into account customer safety, expertise and experience required to complete the tasks, protection of the customer’s asset against potential damage due to specialized maintenance procedures, and KLA-Tencor IP protection. Based on these considerations, the training task lists will contain an appropriate set of maintenance tasks associated with the tool.

    • Audience - Maintenance Technicians, tool owners
    • Prerequisite - Students should be familiar with general wafer manufacturing processes and have experience servicing tools in a wafer Fab environment.
    • Length - 4 days
 

Objectives:

Upon completion student will be able to:

  • Introduction of SP2 tool and hardware components in the main system
  • Overview of SP2 main system software functions, NGS Calibration Modules
  • Verify System Calibration, PSL Calibration, XY calibration
  • Perform EMO checks, System Voltages check and Interlock tests
  • Data collection and perform a scan

Current Schedule

   There are no classes currently scheduled. Please contact Enrollment Operations to request training.
 

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