PRODUCTS

Certified Used Equipment

SCD-XT: Customer L1 BOA
Share

Course Description:

This customer course provides both hands-on and formal classroom training for process and applications engineers using the SCD-XT. Students will explore the theory and operation of the system. In addition, this course will cover the library generation part of SCD using software version SpectraSuite R4.2.

Audience - Process and Applications Engineers. NOTE: This course is different from the current SpectraCD Customer L1BOA course, which covers tool operation using the Summit software(used on SCD100 and SCD200 tools) with library generation on SpectraSuite R4.2

Length: 5 Days

Course Objectives

At the completion of this course, students will be able to:
  • Understand theory of SCD measurement.
  • Setup recipes on SCD-XT system to acquire SCD spectra for off-line analysis and library generation.
  • Generate libraries for 2D and 3D (contact hole) applications.
  • Understand and implement techniques to create robust libraries.
  • Understand the prerequisites for SCD metrology .

Current Schedule

   There are no classes currently scheduled. Please contact Enrollment Operations to request training.
 

Related Products