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Quantox L1 BOA Operations and Applications |
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This is an introductory course for the operation and application of the Quantox® Silicon and Oxide Monitoring system, designed for process engineers who use the systems in a wafer fabrication area. The course provides the student with an understanding of the theory of operation, associated technology, and system components; the capability to create measurement and run recipes; a methodology for troubleshooting measurement results; and an overview of the various applications areas of the tool.
- Audience - Process, Yield, and Applications Engineers
- Prerequisite - Familiarity with wafer manufacturing processes.
- Length - 5 days
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Objectives
Upon completion, student will be able to perform the following:
- Explain the operation of the major hardware components of the Quantox
- Describe the generation and use of the Q-V-SPV curve
- Identify the Types of Oxide and Silicon impurities and defects detectable by Quantox
- Start up and shut down the tool
- Utilize Normal and Advanced modes of Quantox Recipe Builder software
- Inspect Wafers using Quantox Operator Interface software
- Obtain inspection results using Quantox Report Generator software
- Set up multiple inspections using Quantox Automator
- Demonstrate a familiarity with Quantox Data Wizard
- Describe the Input Signal, the Output Signal(s) and the Analysis methods of the most often used Quantox data parameters
- Utilize Parameter Validation Flowcharts
- List the various supported applications of the Quantox and answer questions related to those applications
Course Outline
- Introduction
- Technology Overview & Theory of Operation
- Detailed Parameter Description
- Writing Recipes
- Running Recipes
- Validating Recipe Results
- Overview of Quantox Applications
- Hands-On Exercises
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Current Schedule There are no classes currently scheduled.
Please contact Enrollment Operations to request training.
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