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Certified Used Equipment

OP Series: Recipe Development L1 BOA
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Course Description:

This class provides an overview of Opti-Probe technologies BPR, BPE, VIS, BB, AE, and SE and their applications and capabilities. This class is intended to familiarize the student with optical thin film measurement theory, calibration review and basic system troubleshooting, post-installation system qualification, and using the GO software for recipe development of simple films.

Length: 5 Days
Course Objectives
At the end of this course the student will be able to:
  • Describe the Opti-Probe measurement technologies BPR, BPE, VIS, BB, AE, and SE, their capabilities and applications.
  • Describe the calibration and diagnostic data collection
  • Perform the Opti-Probe calibration and basic hardware troubleshooting
  • Describe the post-installation system qualification measurements, analysis, and specifications (including desorber, WBWS, and RT/CD modules)
  • Perform the recipe and measurement setup (including patterned wafers) using TFMS software
  • Explain the dispersion models and their usage
  • Describe the film models and their applications
  • Describe the basic IOPT screens and basic functions
  • Describe the GO software
  • Perform Hands-on exercises on GO to become familiar with the software functionality
  • Describe the recipe development for simple films using the GO softwar

Current Schedule

   There are no classes currently scheduled. Please contact Enrollment Operations to request training.
 

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