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HRP-X40: L1BOA Basic Operations and Applications |
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This is an introductory training course for the operation and application of HRP, designed for process engineers in a wafer fabrication area. Instruction will provide the student with information on the functionality of major system components; efficient navigation through the software structure and features; and understanding of the limitations, sequence building, calibrations and applications of the HRP systems for both the contact and dipping modes. The course format combines lectures, discussions, demonstrations, and hands-on exercises to reinforce concepts. Enrollment is limited to six students.
- Audience - Process and Application Engineers
- Prerequisite - none
- Length - 5 days
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Objectives
Upon completion student will be able to:
- Describe the stylus geometry and different radii
- Describe how the capacitor sensor registers the displacement
- Explain Groove Width Loss for Different Radii, Tip Angles, and Groove Depths
- State the differences between long wave cutoff filters and short wave cutoff filters
- Name and explain the three different classes of surface texture
- Define TIR
- Explain the overview functions of the top level menu
- Explain the difference between sample stage vs. sensor stage
- Show how to load a sample manually/automatically
- Explain how to choose appropriate stylus (i.e. styli speed and force ranges)
- Set up measurement parameters for short scan and long scan
- Set up and save leveling and measurement cursors
- Set up edge detection and its importance
- Show how to edit a scan recipe and trace analysis screen
- Show how to save, print, and review data
- Set up measurement parameters for a 3-D scan recipe
- Show how to manipulate 3-D scan data
- Show how to export 3-D plots graphically
- Create and run a sequence recipe
- Explain differences between No Deskew, Manual DeSkew, and Pattern Recognition
- Show how to teach a die grid and load a die grid
- Explain the use of die grid in teaching scan location
- Show auto verification of taught locations
- Set up automatic handler operations
- Set up a multi-analysis operation
- Save, export, and print sequence data automatically
- Set up a site-by-site pattern recognition
- State the advantages of image processing/enhanced patter recognition
- Perform a stylus change
- Name & explain the purposes of the 4 calibrations
- Perform and analyze the 4 calibrations
- Fine tune scan position offset calibration check
Course Outline
- HRP Theory and hardware
- Sofware 2D and 3D recipes
- Data Analysis
- Software Sequence recipes
- Changing of the Stylus
- Calibrations
- HRP Dipping Mode theory
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Current Schedule There are no classes currently scheduled.
Please contact Enrollment Operations to request training.
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