Archer AIM_RDM:L1BOA Basic Operations and Applications
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The Operations and Overview Course is designed for anyone wishing to learn how to operate the KLA-Tencor Archer 10 systems. This course will provide a person new to the Overlay system with a general description of the tool as well as an overview regarding the functional concept of the system. The emphasis of the course is on operations. As such, persons attending this course will learn about the menus and parameters involved in creating and running inspections. Traditional overlay targets, as well as KLA-Tencor's AIM target will be trained and incorporated into overlay recipes by the student. The student will also receive basic instruction and practice with RDM, the Recipe Database Manager. This part of the course will focus on creating offline waferless recipes. K-T Analyzer, the analysis tool available from KLA-Tencor, will be explored, as well.

  • Audience - Applications and Process Engineers, Operators
  • Prerequisite - None
  • Length - 5 days
 

 Objectives

Upon completion student will be able to:

    • Create Misregistration programs for traditional and AIM targets
    • Run jobs, Batches, and PMs
    • Manipulate Recipe/Program files
    • Optimize misregistration programs using advanced features
    • Troubleshooting basic (recipe) problems
    • Create Waferless recipes using RDM
    • Copy and paste recipe elements
    • Use the Results Viewer to import and export results
    • Configure and run an analysis recipe in K-T Analyzer
    • Address basic preventive maintenance problems

Course Outline

The main modules of the course are:

  • Introduction to System Operations
  • Wafer Alignment and Wafer Map
  • Misregistration Measurement Theory & Setup
  • Theory of LINNIK Interferometer
  • Advanced Misregistration Setup
  • Calibration and Diagnostics RDM

Current Schedule

   There are no classes currently scheduled. Please contact This e-mail address is being protected from spambots. You need JavaScript enabled to view it to request training.
 
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