AITX: L1BOA Basic Operations and Applications

This is an introductory course for the operation and application of the Surfscan® AIT X Advanced In-Line Defect Inspection system, designed for process engineers and defectivity / yield engineers who use the systems in a wafer fabrication area. The course provides the student with an understanding of the theory of operation and system components. Additionally, the students are provided the information and hands-on training to enable them to create product-worthy recipes. Effective recipe optimization methods are emphasized

    • Audience - Process and Yield Engineers
    • Prerequisite - Students should be familiar with wafer manufacturing processes in general.
    • Length - 5 days


At the completion of this course, students will be able to:

    • Identify and describe AIT components and systems
    • Utilize the Production and Engineering modes of operation
    • Create a recipe for both a memory and a logic device
    • Explain the purpose of various Data Processing Board parameters
    • Optimize a recipe

Course Outline

    • Introduction
    • Theory of Operation
    • Software Overview
    • Recipe Learn
    • Recipe Optimization
    • Alignment and Registration Verification
    • Hands-On Exercises

Current Schedule

   There are no classes currently scheduled. Please contact This e-mail address is being protected from spambots. You need JavaScript enabled to view it to request training.

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