The Operations and Overview Course is designed for anyone wishing to learn how to operate the KLA-Tencor 5100/5200 series systems. This course will provide a person new to the 5xxx series system with a general description of the system as well as an overview regarding the functional concept of the system. However, the emphasis of the course is on operations, as such, persons attending this course will learn about the menus and parameters involved in creating and running inspections. Student will also receive basic instructions on interacting with the Analysis Station. The emphasis on the Analysis Station portion of the courses is placed on KLASS (KLA Stepper Setup). The student will receive basic instruction on analyzing the inspection data with KLASS.

• Audience - Applications and Process Engineers, Operators
• Prerequisite - None
• Length - 5 days

Objectives

Upon completion student will be able to:

• Create Misregistration programs
• Run inspection programs
• Manipulate Recipe/Program files
• Optimize misregistration programs using advanced features
• Troubleshooting basic (recipe) problems
• Transfer results to the analysis station (KLAUT)
• Perform basic KLAUT functions
• Run the basic daily preventive maintenance functions
• Address basic preventive maintenance problems