PRODUCTS

Certified Used Equipment

24XX: L1BOA Basic Operations and Applications
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This is an introductory course designed for the users of the KLA-Tencor 2401 System. This course will combine lecture and hands-on training focusing on System Overview, Architecture, Recipe Editing, Setup, and Review.

  • Audience: Customers and KLA-T Field Applications Engineer
  • Length of Class: 3 days
  • Prerequisites: none

Current Schedule

   There are no classes currently scheduled. Please contact Enrollment Operations to request training.

Course Objectives

Upon completion the student will be able to:

  • Gain basic system knowledge
  • Create/Modify wafer inspection recipes
  • Import/Export Recipes
  • Run Recipes
  • Review Results
  • Transfer Results
  • Validate Recipes

Course Outline

Day 1 Objective: Viper Overview and Creating New Recipes

  • What is Viper used for?
  • What type of Lithography Problems would solve?
  • What is Viper's resolution?
  • Which illumination channels does Viper use?
  • Theory of Recipe Creation
  • Learning a Test Recipe
  • Maximize Gain Ranges
  • Setup the Thresholds values
  • Setup the sensitivity values
  • Activating the Variance Mask
  • Generating the Reference Set

Day 2 Objective: Creating Derivative Recipes; Running and Reviewing Recipes

  • Modifying existing recipes
  • Setting up the sampling criteria
  • Setting up the Pass-Fail criteria
  • Image storage
  • Running multiple recipes
  • Overwriting the sampling size
  • Performing multiple repeats
  • Performing lot review
  • Performing single wafer review
  • Reviewing Viper result reports

Day 3 Objective: Hands-On Training

  • Generate a production worthy recipe
  • Optimize the threshold and the sensitivity values
  • Run the recipe
  • Review the results
  • Transfer the data to a local drive
 

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