Product Description 

Therma-Probe is the industry standard for implant dose metrology. With its advanced modulated optical reflectance technology, Therma-Probe provides dose measurements for in-line monitoring, including ultra-shallow junction (USJ) parameters characterization. The system contributes to higher yield by monitoring for process excursions.

• Measurements on product wafers eliminate cost of monitor wafers
• In-line monitoring helps reduce or prevent scrap
• In-line implant tool qualification checks enhance implant productivity
• Superior tool matching performance facilitates fab-to-fab technology transfers

High-resolution in-line dose and energy monitoring, precise measurement of tilt variations, implant microuniformity imaging, anneal micro-structure mapping, USJ depth, abruptness and active carrier concentration measurement, screen oxide measurement.

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