Product Description

The RS-200 resistivity mapping system based on proven industry standards provides accurate and reliable sheet resistance measurement for 45 nm and beyond. This system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers.

• Accurate and repeatable resistivity measurements to 1mm from the conductive film edge gives enhanced performance for both 200mm and 300mm wafers
• Patented temperature compensation provides the accuracy, long-term repeatability, and system-to-system/fab-to-fab matching for today's production requirements
• Powerful, easy to use Windows

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