Product Description

The RS-100 resistivity measurement system is a production worthy tool used in nearly all fabs worldwide. This system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers.

• Accurate and repeatable resistivity measurements to 1mm from the conductive film edge gives enhanced performance for both 200mm and 200mm wafers
• Patented temperature compensation provides the accuracy, long-term repeatability, and system-to-system/fab-to-fab matching for today's production requirements
• Powerful, easy to use Windows NT-based software enables true multi-tasking capabilities

Application

Metal deposition, CMP, ion implantation and diffusion

Enhanced Edge Performance Leading the industry, the RS-100 is the first resistivity system with enhanced edge performance, collecting measurement information up to 1 mm from the conductive film edge. Not only does this additional information provide greater insight to process control variance, it extends a wafer's useable area, lowering cost-of-ownership. An innovative approach to wafer alignment also improves the probe placement accuracy and repeatability over existing systems.

Powerful, Easy-to-Use Software Operating on Windows NT

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