Product Description

ProDATA is a powerful CD and SEM image analysis tool that provides a systematic, robust approach to understanding and optimizing lithography processes across the fab. This tool speeds critical decision-making by enabling fast, easy, and accurate analysis of experimental lithographic CD data.

• Reduced engineering decision time and increased engineering productivity.
• Reduced analysis time for process characterization, equipment qualification, new reticle introduction/qualification, and resist evaluation.
• Simultaneous optimization of CD performance across multiple features.
• Increased yield through better centered processes and greater tolerances.
• Repeatable, rigorous process window analysis.
• Top-down SEM image analysis provides both single image analysis and overlap analysis capabilities.

Application

• Stepper qualification
• Optimization of new photo process
• New reticle verification and qualification
• Data analysis for photo tool monitoring
• Photoresist performance comparison
• Visualization of lithographic data and analysis results
• Optimization of photo tool parameters such as numerical aperture and partial coherance

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