Product Description

The OptiProbe OP3291 (DUV) is an enhanced version of the legacy Opti-Probe tool set, and provides enhanced throughput and productivity features needed in a high volute 100mm - 200mm fabrication. By integrating three (OP3291) or four (OP3291DUV) technologies into one tool, it enables stable measurements of thick and thin films, and film stacks.   The system provides thickness, index, and extinction measurements.  The DUV model includes fitting in the UV down to 190nm, significantly improving measurement capability for films with features in the UV spectral range.

The OP3291 tools are simple to use, as an entire suite of pre-developed (BKM) applications for all fab modules is included. Pre-developed recipes for all fab modules allow the system to be released to production quickly after installation, with minimal recipe development needed for standard films and stacks.

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