Product Description

The OmniMap RS75 four-point probe series provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems. This production-worthy tool is ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.

The system provides throughput of over 100 wafers per hour when conducting a five-site test, complete with temperature compensation and flat alignment, on 200 mm wafers. A 49-site contour map with temperature compensation can be achieved on a manually loaded test wafer in less than sixty seconds. The overall measurement speed is approximately one second per site.

For complete information, download the product overview below.

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• Omnimap RS75 Product Overview