Metrology

Integrated Circuit

LithoWare
LithoWare is a new Linux-based OPC/RET development tool from KLA-Tencor. LithoWare is the first tool to turn to for OPC/RET development for your next node.

Product Description

LithoWare is a Linux-based lithography optimization tool that enables engineers to begin their OPC/RET development without the need to wait for a mature silicon process. LithoWare also dramatically reduces the time and cost to develop RET and OPC recipes.

  • OPC and process co-optimization reduces process and OPC development time and effort
  • Integrating seamlessly into the EDA workflow, LithoWare complements existing tools
  • Distributed computing enables faster runtime

Application

Lithography and etch

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Related Information

Technical Papers