Metrology

Integrated Circuit

Aleris™ 8500

Product Description

The Aleris 8500 provides the best measurement performance and technology to meet advanced application thickness and composition requirements for new materials and devices structures at 45nm and beyond. Features the unique 150nm BBSE which enables Aleris 8500 to be the industry first single tool solution for production monitoring of critical gate applications

  • Broadband Spectroscropic Ellipsometry (BBSETM) optics that provide a significant improvement in precision, matching and stability.
  • 150nm BBSE enhances sensitivity to composition measurement
  • StressMapper TM's highly spatial resolution at high throughput allows for production monitoring of 2D stress

Application

Composition and thickness measurements for critical gate applications, thickness for ultra-thin stacks, and high stress FEOL films

Comprehensive Films Metrology Control

The Aleris 8500 (advanced thickness composition and stress metrology), Aleris 8350 (thickness, refractive index, and stress metrology), Aleris 8310 (thick simple films metrology), Quantox XP (in-line real-time electrical monitoring and characterization), and Rs-200 (resistivity metrology), provide comprehensive films metrology control using optical and electrical topography measurements.


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