Researchers at advanced IC manufacturers, stepper companies, track companies, and material providers use virtual lithography software to explore critical-feature designs, manufacturability and process-limited yield of proposed lithographic technologies without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.

• PROLITH: Lithography simulation tool designed for R&D scientists and engineers
• ProDATA: Critical-dimension (CD) analysis tool
• LithoWare: Linux-based lithography optimization tool for EDA users (OPC and RET engineers)
• ProBEAM: 3-D electron beam lithography simulator