Lithography Glossary

Written by Chris Mack
Brought to you by the creators of PROLITH

ULSI
Ultra Large Scale Integration, an integrated circuit made of millions of transistors.

Example: Today's ULSI circuits challenge every aspect of semiconductor manufacturing.

UV
Ultraviolet, the portion of the electromagnetic spectrum with wavelengths lower than can be seen by the human eye (typically taken to be wavelengths of about 400nm and below).

Example: Unlike g-line, the i-line wavelength of the mercury spectrum is in the UV and is not visible to the human eye.

UV Cure
A post-development process by which the resist patterns are exposed to deep-UV radiation (and often baked at the same time) in order to harden the resist patterns for subsequent pattern transfer. The UV cure is often a replacement for the hard bake step.