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Lithography Glossary

Written by Chris Mack
Brought to you by the creators of PROLITH


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�hler Illumination
A method of illuminating the mask in a projection imaging system whereby a condenser lens forms an image of the illumination source at the entrance pupil of the objective lens, and the mask is at the exit pupil of the condenser lens.

Example: The use of K�hler illumination has become standard in projection lithography due to its superior uniformity.

KrF
Krypton Fluoride, a type of excimer laser used in optical lithography that emits light at about 248nm.

Example: KrF exposure tools have been the most popular lithographic tools since the 250nm resolution node.


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