Our Performance Portfolio of service agreements supports leading edge 300mm, mask, and wafer factories where productivity and performance are essential. The Performance portfolio is offered in Full, Plus and Premium configurations – providing a solution for every service level required.

ONLY KLA-TENCOR SERVICES:

• Delivers the expertise to service highly complex inspection and metrology systems
• Ensures customers achieve the required uptime with uncompromising sensitivity and precision
• Provides a broad portfolio of service agreements to meet the requirements of both leading edge and mature factories

KLA-Tencor Services continuously invests in a service infrastructure of expert personnel, parts, logistics, tooling, diagnostics, documentation, systems and processes to deliver superior support of KLA-Tencor tools worldwide.