Klarity Spatial Signature Analysis (SSA)
Klarity SSA (Spatial Signature Analysis) is an add-on process monitoring capability for KLA-Tencor's Klarity yield analysis software, enabling accelerated yield learning and improved baseline yields. Klarity Spatial Signature Analysis employs a proprietary algorithm that automatically detects and classifies spatial signatures (i.e. defect clusters and patterns) which can indicate an out-of-spec process or a process tool problem.
Klarity Spatial Signature Analysis with Klarity Defect, Klarity Bitmap, and Klarity ACE XP form a fab-wide yield acceleration solution that automatically reduces defect inspection, defect signature classification and review data to relevant spatial signature root-cause analysis and yield-analysis information. Using this spatial signature analysis information, manufacturers can take corrective action sooner, resulting in faster yield improvements and better time to market.