Infrared Defect Inspection and Review Station
The KLA-Tencor IRIS2000 is a fully automated, high throughput defect inspection, review and metrology tool. It uses infrared light to look into wafer and other substrate materials — which are transparent at IR wavelengths.
Applications such as MEMS device/cavity seal inspections from both sides of the wafer, sub-surface inspection for shorts, contact/bridge defects, inclusion tracing, as well as alignment offset measurements for wafer-level packaging are now possible with a high throughput process monitor tool.
High performance IR optics with a high efficiency InGaAs infrared camera provides images with excellent resolution and contrast. The Smart Defect Inspection (SDI) software ensures highest defect sensitivity repeatability and detection accuracy. The sample handling track with a flexible robot and a high-performance scanning stage allows reliable and safe material transport and substantially contributes to the very high throughput.