|
Automated Optical Defect Review and Classification System (200mm/300mm)
 Product Description
The INS3300 automated optical defect review and defect classification system incorporates UV and DUV optics for the highest resolution available on any optical review microscope. Fully automated and production-ready, the INS3300 defect classification system is user-friendly, ergonomic and reliable.
- Ultimate optical resolution and throughput up to 2200 defects per hour
- User-friendly operation with review interfaces for all major inspection systems
- Automatic Defect Classification (ADC) for all optical modes, including DUV
- Flexible system layout, including front-, rear- or side-loading configurations with two loadports (FOUP and open-cassette)
- Automatic defect review capability for efficient image capture and offline review
- Optional UV, DUV and DIC module, retrofitable to existing INS systems
- Optional image capture and archive modules
- Optional specialized automated inspection with SpotCheck
Related Information
|
