The KLA-Tencor INM100 high-performance optical brightfield, darkfield, DIC, fluorescence and UV microscope for routine review of wafers, masks, MEMS, optoelectronic devices and hard disk substrates is a cost-efficient package.

Advanced ergonomics provide a versatile and comfortable platform for all manual review applications in failure analysis and in production process control

• Multiple imaging modes provide versatility for a wide spectrum of substrate material analysis
• The retrofit kit for 365nm UV illumination and imaging provides microscope resolution down to 0.13µm
• Trinocular tube with video port provides an upright, laterally correct image in eyepieces and TV-exit
• The viewing angle of the microscope's eyepieces can be adjusted from 0 to 35 degrees providing the optimum eye-point level for every user
• Motorized objective nosepiece and aperture diaphragm
• High-precision manual focus with coarse, fine and ultrafine drives enable a fast, smooth and exact focusing

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