Metrology

Data Storage

KerrMapper™ VS300
 
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Wafer Mapping System

Product Description

The KerrMapper V/S300 is a magnetic wafer mapping system designed especially to meet the magnetometry needs of the disk drive head wafer, perpendicular magnetic recording (PMR) media, soft under layer (SUL), and MRAM production processes. KerrMapper rapidly and automatically creates maps of the magnetic characteristics of entire wafers. The magnetometer can be configured for vector magnetometry (V300) or for magnetic skew metrology (S300).

KerrMapper V/S300’s ability to measure at both high fields (up to 1.2 Tesla) and low fields while providing very fine resolution, makes it a powerful diagnostic tool. Active field control is as low as 0.001 Oe. The field has zero remanent.

The KerrMapper S300 skew measurement configuration permits a user to perform a fully automated mapping measurement of the angular dependence of any parameter measured by the system. S300 incorporates a high-precision integrated Z/Theta stage and associated parts, as well as new measurement capability integrated into the operating software. Because of the seamless software integration, enabling this feature requires no additional operator training.

The KerrMapper V300 vector configuration is capable of measuring both components of Kerr rotation. Using a patented vector Kerr capability, it measures easy axis distribution with unparalleled accuracy and determines the switching field distribution with great accuracy. The results are nondestructive mapping measurements of vector magnetic properties, such as the anisotropy field. KerrMapper also measures both components of the Kerr rotation in the presence of a rotating field.

Application 

MRAM, MR, GMR, TMR and permanent magnet wafers.
  • The S/V300 Wafer Mapping System is available both as a low-cost manual-loading tool for use in development or limited-production environments and also as a fully-automated cassette handling tool for use in volume production of 300mm wafers. Stage positioning is aided with a small laser spot, and a high resolution camera view, imaging a wafer location to under 2 microns.
Magnetic Property Mapping of PMR Media & SUL
  • Post deposition monitoring of magnetic media, utilizing the Magneto-Optic Kerr Effect, which is both non-contact and non-destructive. Results include mapping of critical field-related magnetic properties of the Recording Layer & SUL: Hc, Hr, Hn, Skew Angle Distribution, etc. KerrMapper can also determine the temperature dependence of recording layer magnetics
Head wafer testing
  • The V300 is suitable for the most advanced hard disk drive head wafer metrology, and can be configured for either R&D or production.
Tunneling magnetoresistive (TMR)
  • Performs in-depth studies of the uniformity of the tunneling magnetoresistive (TMR) stacks at the sheet film level.
MRAM wafer magnetic properties
  • A proprietary quadrupole magnet design with active field control allows MRAM developers to simulate the action of the MRAM device early in the process of magnetic films, and characterize patterned MRAM arrays.
Additional Applications
  • Easy Access Dispersion, Magnetic Characterization, Sputtering Process Control

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