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KLA-Tencor Receives Grand Award from Semiconductor International Magazine for Advanced Electron-Beam Inspection Technology
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SAN JOSE, Calif., Nov. 15, 2001 - KLA-Tencor Corp. (Nasdaq: KLAC) today announced that it has received the prestigious Grand Award for its eS20XP scanning electron-beam (e-beam) wafer inspection system as part of Semiconductor International magazine's Editors' Choice Best Product Awards program. Established in 1989, the annual awards program recognizes 20 products used in semiconductor and related manufacturing. This year, KLA-Tencor's eS20XP system was singled out as the Grand Award winner in recognition of its contributions to the industry in accelerating the development and production ramp of new semiconductor processes, including copper and low-k dielectrics. Customers have cited the eS20XP's industry-leading throughput and sensitivity as key to enabling them to significantly reduce their electrical defectivity and yield-learning cycle times on their latest-generation devices.

"The Editors' Choice Best Products program differs from other awards in that products must be nominated by users, not by people who make or sell them. A product that receives this award has been verified to demonstrate superior and proven production capabilities that advance semiconductor innovation and manufacturing," noted Peter Singer, Semiconductor International editor-in-chief. "This was most clearly the case with KLA-Tencor's eS20XP e-beam wafer inspection system, which led our editorial team to select it as the Grand Award winner out of this year's 20 winners."

The eS20XP detects electrical defects during front-end-of-line (FEOL) processing at speeds unmatched in the industry. Using its state-of-the-art voltage contrast capability, it can inspect an entire wafer in little more than one hour as compared to days required by previous generation and competitive e-beam systems. In addition, since the eS20XP enables fab engineers to find electrical defects at the source layer instead of at back-end-of-line (BEOL) electrical test, the tool dramatically reduces the risk of weeks or months worth of work in progress (WIP) to exposure to these yield-killing defects.

The eS20XP also detects physical defects as small as 50 nm, as well as defects in high aspect ratio structures, which are extremely hard to detect using other inspection techniques. In addition, it employs industry-leading charge control technology, which enables customers to inspect process layers and materials such as silicon on insulator (SOI) and low-k dielectrics that previously could not be inspected due to charging issues.

"It's truly an honor for us to have received this award," stated Rick Wallace, executive vice president of KLA-Tencor's Wafer Inspection Group. "The eS20XP represents one of the most successful product introductions in KLA-Tencor's history. It is the most widely adopted e-beam inspection system on the market, with the vast majority of leading logic, DRAM and foundry manufacturers having purchased it for use in their advanced design rule production lines. This proves, once again, that customer satisfaction is the greatest testament of all to our success."

KLA-Tencor appeared on Semiconductor International's award list in 2000 with its Catalyst advanced process control software, and in 1999 with its ASET F5 thin film measurement system. In 1998, KLA-Tencor received the Grand Award for its AIT patterned wafer inspection system as well as an award for its High Resolution Profiler Series.

About Semiconductor International: Semiconductor International, published by Cahners Business Information and a part of Reed Elsevier's global array of technical publications, is the leading technical publication reaching and covering the global semiconductor industry. SI boasts the industry's most experienced full-time technical editorial team, and has the largest circulation to semiconductor manufacturers of any industry publication. Additional information about SI and its many products and activities are available at www.semiconductor.net.

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC.

Contact:
Meggan Powers
Director Corporate Communications

 

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