Richard P. (Rick) Wallace
Chief Executive Officer

Richard (Rick) P. Wallace currently serves as the President and Chief Executive Officer KLA-Tencor Corporation^®. Previously, Mr. Wallace served as President and Chief Operating Officer from July 2005 through December 2005. He began at KLA Instruments in 1988 as an applications engineer and has held various general management positions throughout his 22 years with the company. He currently serves on the Board of Directors of Semiconductor Equipment and Materials International (SEMI), an industry trade association and Beckman Coulter^®, an Orange-County based biomedical company. Earlier in his career, Mr. Wallace held positions with Ultratech Stepper^® and Cypress Semiconductor^®.

Mr. Wallace earned his bachelor’s degree in electrical engineering from the University of Michigan and his master’s degree in engineering management from Santa Clara University, where he taught strategic marketing and global competitiveness courses after his graduation.

Ben Tsai

EVP, Chief Technology Officer and Corporate Alliances

Ben Tsai is executive vice president, CTO and Corporate Alliances for KLA-Tencor. In his post, Dr. Tsai is responsible for setting the technology direction for the company, business development, corporate alliances and venture investments. He is a key member of KLA-Tencor’s executive management team, and has held numerous positions at KLA-Tencor and KLA Instruments, prior to the KLA-Tencor merger.

At KLA-Tencor, Dr. Tsai has served as group vice president, CTO of systems and general manager for the Wafer Inspection Division. Prior to the KLA-Tencor merger, Dr. Tsai filled the post of CTO at KLA Instruments as well as numerous executive positions in the Wafer Inspection Division. Dr. Tsai also spent two years as general manager of engineering for KLA Acrotec, a joint venture between KLA Instruments and Japan Energy. In addition to working for KLA-Tencor and KLA Instruments, Dr. Tsai was senior vice president and executive officer, technology at Tokyo Electron Limited, a leading global supplier of semiconductor production equipment. Dr. Tsai currently serves on the board of Varian Semiconductor Associates Inc. Dr. Tsai is also a member of the Technical Advisory Board of Ultratech Inc.

Dr. Tsai holds more than 30 patents in the areas of inspection and metrology. He received his bachelor’s degree in electrical engineering from the National Taiwan University and a master’s degree and Ph.D. in electrical engineering from the University of Illinois at Urbana-Champaign.

Mark P. Dentinger
Executive Vice President and Chief Financial Officer

Mark P. Dentinger serves as KLA-Tencor’s Chief Financial Officer. In his position, he oversees and manages the company’s Corporate Finance, Operational Finance, Investor Relations and corporate control processes. Furthermore, Dentinger ensures that KLA-Tencor continues to maintain a strong financial foundation to support its growth strategy and future business objectives.

Prior to working for KLA-Tencor, Dentinger held various senior finance roles during his nine years at BEA Systems, Inc. (now part of Oracle Corporation), including Chief Financial Officer for the last three years. In his former post, he managed all aspects of Finance, Investor Relations, Legal, Facilities, and Information Technology, among various other financial roles within the company. Previous to this, Dentinger worked at Compaq Computer Corporation (now part of Hewlett-Packard) for six years. There he served in various financial management positions until he was appointed Director of Finance, High Performance Systems Manufacturing, in 1996. Before joining Compaq, Dentinger spent nearly a decade at Ernst & Young where he worked as a Junior Staff Auditor and later a Senior Manager.

Dentinger received his Bachelor of Science in Economics from St. Mary’s College of California and his MBA in Finance from the University of California at Berkeley.