Lithography Modeling
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Researchers at advanced IC manufacturers, stepper companies, track companies, and material providers use virtual lithography software to explore critical-feature designs, manufacturability and process-limited yield of proposed lithographic technologies without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.

  • PROLITH: Lithography simulation tool designed for R&D scientists and engineers
  • ProDATA: Critical-dimension (CD) analysis tool

 





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