KLA-Tencor’s defect review systems capture high resolution images of the defects detected by inspection tools. The images provided by our defect review systems enable defect classification, helping chipmakers to identify and resolve yield issues. Our complete line of defect review and classification tools spans optical and electron-beam technologies, from bench-top research systems to production-worthy tools having full factory automation. KLA-Tencor’s suite of defect inspectors, defect review and classification tools and data management systems form a complete solution for finding, identifying and tracking yield-critical defects and process issues.

E-beam

• eDR-52xx Series: SEM-based defect review and classification systems

Optical

• INM-Series: Universal defect review microscopes
• INS-3xxx: Automated, full-spectrum optical review and classification systems
• IRIS: Infrared inspection and review station