For 21XX owners ready to increase production levels or move to new technology requirements, we offer a unique portfolio of productivity upgrades. Through these offerings, we can work with you to enhance the capabilities of your tools, quickly and cost-effectively.

• Maximize productivity with lot queuing and faster inspection times
• Increase die yield with 0.16- µm pixel or greater sensitivity
• Ease tool operation with Windows NT user interface, job queuing, iSECS and iLink
• Increase capacity without investing in additional tools
• Reduce service costs with 24/7 iSupport

KLA-Tencor offers a full portfolio of field-proven, high quality upgrades that can enhance capabilities to meet increased production requirements and inspect and measure next-generation
devices--without incurring major capital costs. We can install these upgrades in your fab anywhere in the world, to provide you with upgraded, reliable performance and enable you to maximize the return on investment in your KLA-Tencor tools.
For complete information, download the overview below.

Disclaimer: Important information about used products

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• Upgrades-21xx (English, 172 KB)