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Surfscan 6220
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Unpatterned Surface Inspection System

Product Description

The Surfscan ® 6220 is designed for detecting, counting and sizing particles, pits and scratches on bare wafers and wafers deposited with smooth blanket films, and for measuring haze on a broad range of surfaces. The system's patented optical design and advanced digital signal processing techniques ensure exceptional sensitivity -- down to 90 nm on well-polished silicon. Low false count rates are also ensured due to a proprietary algorithm that distinguishes true defects from stray noise spikes.

The Surfscan 6220 is based on the established Surfscan 6200 platform, and offers superior performance, low cost of ownership, and high throughput. In addition, a Windows-based interface simplifies user training and operation.

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