Product Description

To meet demanding productivity requirements, the Prometrix^® UV-1250SE Thin Film Measurement System is a single-solution tool that can independently and simultaneously measure film thickness, refractive index, extinction coefficient, and goodness-of-fit of single-layer or multi-layer thin film stacks.

Direct measurement of the refractive index and the extinction coefficient of films in a film stack, and indirect goodness of fit measurements of the film quality, results in greater productivity per metrology step and tighter process control.

The Prometrix UV-1250SE Thin Film Measurement system combines the power of spectroscopic ellipsometry and the functionality of broadband UV spectrophotometry in a production-worthy platform. Long considered by scientists to be the ultimate technique for non-destructive optical characterization, spectroscopic ellipsometry (SE) has found widespread use in research and development.

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