Product Description

The Prometrix ® UV-1050 system is designed for challenging thin film measurement applications. Based on proprietary advanced reflective optics, the UV-1050 system's broadband UV technology provides measurements on a wide range of applications including oxide on polysilicon, ultraviolet (UV) reflectivity, etch-to-clear, and simultaneous oxide and TiN thickness for CMP applications.

Advanced Measurement Capability Enhanced algorithms, such as scattering and seedless simultaneous multilayer, take advantage of the UV-1050's broadband UV capabilities and provide advanced DRAM and microprocessor measurements. The system's reflectivity and Gamma curve capability allows users to characterize resists for use with I-line and deep-UV steppers (365-248 nm), and monitor variations in anti-reflective coatings.

The UV-1050's spectral analysis software allows examination of how the measurement calculations are made, by comparing measured and theoretically modeled reflectance spectra. The software allows optimization of the films' refractive index dispersion for greater accuracy and repeatability. Any measurement problems can be easily diagnosed.

For complete information, download the overview below.

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• UV-1050 Product Overview