Product Description

• Enable higher throughput and lower cost of ownership while maintaining the required sensitivity with Dual AOD (Acoustic Optical Deflector) technology, which provides a three-fold increase in scan rate compared to previous systems
• Support sensitivity requirements for sub-100-nm design rules with UV laser illumination, increasing the amount of light scattered from small defects
• Increase capture on critical defect types and get up to four-fold increase on edge die with advanced detection algorithms
• Provide maximum sensitivity and improved dynamic range in all die regions without the need for multiple-pass inspections with real time Adaptive Mode™ technology
• Suppress grain, previous layer noise, and color variation for superior defect capture with three-channel, double-darkfield optics.
• Optimize speed and sensitivity combinations for a wide range of production applications with MultiSpot™ illumination.
• Get faster time to results through better nuisance filtering, defect review sample reduction, and trending by killer-defect type with Inline Automatic Defect Classification (iADC)

AIT UV is the latest evolution of KLA-Tencor's production-proven AIT family of high-throughput, high-sensitivity double-darkfield inspection systems. Developed to address the special needs of 300-mm inspection and excursion monitoring at 100-nm design rules and below, AIT UV provides detection capability for current-layer defects at speeds up to five times faster than KLA-Tencor's previous-generation AIT XP system. This includes layers with grain, high color variation, or other noise sources, such as CMP layers, copper/low-k interconnects, and multi-layer film stacks.

Optimized Defect Solutions
With a full range of AIT systems now available, fabs can achieve faster time to results while reducing CoO by deploying the right combination of KLA-Tencor inspection tools. Together with AIT XP+ (upgradeable, cost-effective throughput and sensitivity), 2351 (maximum sensitivity for critical line monitoring applications) and eS20 (benchmark sensitivity in process development, ramp, and engineering analysis), AIT UV is part of KLA-Tencor's commitment to provide customers with optimized inspection solutions for throughput, sensitivity, and CoO.

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• AIT UV Family Product Overview
• Breaking Through the Copper_ow-K Barrier(4/28/2002)