Product Description

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The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. The 5200XP enables users to tighten overlay budgets, improve overlay control and maximize utilization of their lithography tools by minimizing stepper idle time.

The 5200XP's leading-edge overlay metrology technology results in:

• Overlay measurement performance to meet the requirements of 0.18 µm design rules
• Highest total throughput in the industry through rapid measurement and integrated analysis
• Most robust solution for measuring low-contrast and asymmetric overlay targets
• Higher operator productivity through an ergonomic console and easy-to-use graphical user interface
• Excellent long-term stability
• Compatibility with current factory automation standards

For complete information, download the product overview below.

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• 5200XP Product Overview
• 5200XP Spec Sheet