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2139
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Wafer Inspection System with Improved Sensitivity and Productivity

Product Description

The 2139 wafer inspection system provides the sensitivity enhancements and productivity improvements IC manufacturers need to meet the requirements of accelerated ramps, reduced capital expenditures and faster cycle times.

The 2139 is available as an independent tool or as an upgrade to existing 2135 and 2138 tools. The upgrade path allows IC manufacturers to leverage their existing assets by extending the life of their current KLA-Tencor tools to quickly develop their next generation devices at the lowest possible capital cost. The 2139 is based on KLA-Tencor's proven image processing technology which includes ultra-broadband (UBB) illumination and Segmented Auto Threshold (SAT) technology. These features along with significant sensitivity and productivity improvements make the 2139 a cost-effective solution for increasing inspection capacity and capability.

The 2139 is also available with an integrated SMIF mini-environment, reducing overall fab cleanliness requirements while stream-lining automation. For complete information, download the product overview below.

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